Thin Film Deposition using a Velocity-Selected Vacuum Deposition Method. Development of Velocity Selector and Its Application to Vacuum Deposition.

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ژورنال

عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B

سال: 1996

ISSN: 0387-5016,1884-8346

DOI: 10.1299/kikaib.62.2711